UREA Analyzer

Provides Continuous and Accurate Urea Measurements

Ovivo Ultra-Pure Water+ by Ecolab UREA is a critical contaminant in ultrapure water (UPW) for semiconductor manufacturing because it contributes to total organic carbon (TOC) concentration and can adversely affect photolithography processes.

Ovivo by Ecolab UREA analyzer, a newly innovated product, provides continuous and accurate urea measurements with four sampling channels.

Equipment Information

Features and Benefits

Technical Information

How It Works

Process LC-OND Analyzer for UREA Monitoring

The working principle of UREA Analyzer is based on a chromatographic separation, namely LC-OND (Liquid Chromatography – Organic Nitrogen Detection).

The mobile phase (salt buffer) is pre-cleaned by a specially designed oxidation reactor. A defined volume of aqueous sample is picked up by a loop and injected into the continuous stream of the mobile phase. The sample is then fed to a pump and a chromatographic column where urea is separated from other N-species, like nitrate and ammonium.

After leaving the chromatographic column, the solution is fed to a short-wave UV-oxidation lamp reactor where urea is converted to nitrate.

Nitrate is then selectively detected by a low-wave UV absorption detector (UVD).

All species elute according to their specific retention times. Retention time is used for identification, while peak area units are used for quantification.

Related Product

THM Analyzer 1501

Trihalomethanes (THMs) are critical contaminants in drinking water and ultrapure water (UPW) and require monitoring as well as efficient removal.

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Ovivo Ultra-Pure Water+ by Ecolab

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